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Microfabrication Laboratory

The MRL laboratory includes a Cleanroom facility for MEMS micromachining (a class 100 for photolithography, 10,000 for deposition and etching)), and facility for MEMS testing and characterization. Both facilities are well-equipped with state-of-the-art equipment that allows for complete device fabrication (such as deposition/ evaporation, etching/ deep etching, photolithography, profilometry, optical inspection, etc.), and testing and characterization (electrical, optical and thermal).

 

Detailed Equipment List

(1) Reactive ion etcher (Oxford plasmalab 80); (2) Deep reactive ion etcher (Alcatel AMS-100); (3) Plasma asher (Branson/IPC); (4) E-Beam Evaporator/ Sputtering system (co-deposition system, Kurtlesker); (5) Sputtering system (with co-deposition capability, Kurtlesker); (6) Profiler (P16+); (7) Optical microscope (Nikon Optiphot); (8) Hotplates; (9) Electroplating station setup; (10) Oven vacuum; (11) Mask aligner (MA6, Karl-Suss, currently out of order with major electrical and mechanical problems); (12), Spinner; (13) Nanometrics nanospec (AFT 010-01), (14) Wet bench with de-ionized water systems; (15) Digital microscope. (16)Plasma enhanced chemical vapor deposition system (Oxford plasmalab 800); (17) Vapor coater monolayer (MVD).

 

Testing, Characterization and Simulation Laboratory

((1) Black body sources with chopper and chopper controller; (2) Multimeters; (3) Multiple Low noise preamplifiers; (4) Voltage supplies; (5) Monochromator/ spectrograph; (6) Dynamic signal analyzer; (7) Micro manipulator tool; (8) A vacuum cryostat equipped heater and cooler with temperature controller to be used for various setups; (9) Blackbody calibration source; (10) Optical power meter; (11) Optical table; (12) multiple Syringe pumps; (13) multiple optical microscopes; (14) Furnace low temp dry wall; (15) Multiple Oscilloscopes; (16) Multiple Temperature controller; (17) Nano Voltmeter; (18) Programmable Current Source; (19) Pico Ammeter; (20) Impedance analyzer Keysight E4990A, (21) Optical signal analyzer, (22) broadband light source; (23) QEPRO-RAMAN-532-PLUS; (24) Laser Source (532-LAB-FC, Ocean Insight); (25) Fusion Splicer; (26) Precision Current Source; (27) System Electrometer.

 

Facilities

 

 

 


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