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Microfabrication Facilities
Mask aligner (MA6-BA6, Karl-Suss)
Mask aligner (MBJ3, Karl-Suss)
Spinner (Cee Model 200X)
Optical microscope (Nikon Optiphot)
Profiler (P16+, KLA-Tencor)
Olympus Optical Microscope
Kurt Lesker deposition system (AXXIS deposition system, co-sputtering and E-beam evaporation)
Kurt Lesker Co-deposition sputtering system
Plasma Enhanced Chemical Vapor Deposition system (Oxford Plasmalab 800)
Reactive Ion Etcher (Oxford Plasmalab 80)
Deep Reactive Ion Etcher (Alcatel AMS-100)
Plasma Asher (Branson/IPC)
Vapor Coater Monolayer (MVD)
Plasma CVD System (AX5200M 1.5kW MW, Seki Technotron Corporation)
Electroplating station (SEMCON 100)
Nanometrics nanospec (AFT 010-01)
Digital microscope (Keyence)
Vacuum oven (Across International)

 
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