Kurt Lesker deposition system (AXXIS deposition system, co-sputtering and E-beam evaporation)
Kurt Lesker Co-deposition sputtering system
Plasma Enhanced Chemical Vapor Deposition system (Oxford Plasmalab 800)
Reactive Ion Etcher (Oxford Plasmalab 80)
Deep Reactive Ion Etcher (Alcatel AMS-100)
Plasma Asher (Branson/IPC)
Vapor Coater Monolayer (MVD)
Plasma CVD System (AX5200M 1.5kW MW, Seki Technotron Corporation)
Electroplating station (SEMCON 100)
Nanometrics nanospec (AFT 010-01)
Digital microscope (Keyence)
Vacuum oven (Across International)
Recent Publications
PDMS elastic micropost array for smooth muscle cell study paper published in Sensors and Actuators B: Chemical read more > Dual Cavity Energy Harvesting Paper published in Journal of Microelectromechanical Systems read more >
Coulter Counter Paper published in Biomedical Micordevices read more >